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CONFERENCE PRESENTATIONS (reviewed or invited) 1.
T. J. Seok, N.
Quack, S. Han, W. Zhang, R. S. Muller, M. C. Wu, “64x64 Low-Loss and Broadband
Digital Silicon Photonic MEMS Switches,”
2015 European Conference on Optical Communication (ECOC), Sept. 27 - Oct. 1,
Valencia, Spain. 2.
T. J. Seok, N.
Quack, S. Han, W. Zhang, R. S. Muller, M. C. Wu, “Reliability Study of Digital
Silicon Photonic MEMS Switches,”
2015 IEEE International Conference on Group IV Photonics, pp.205-6. 3.
N. Quack, T. J.
Seok, S. Han, W. Zhang, R. S. Muller, M. C. Wu, “Row/Column Addressing of
Scalable Silicon Photonic MEMS switches,”
IEEE International Conference on Optical MEMS and Nanophotonics
(OMN), 2-5 Aug. 2015, Jerusalem. 4.
S.Han, T.J.Seok, C.K.
Kim, R.S. Muller, and M.C. Wu, "Multicast
4x20 Silicon Photonic MEMS Switches," CLEO:2015,OSA
Technical Digest(online)(Optical Society of America,2015), Paper STu1F.1,
May, 2015. 5. Richard S. Muller, "Big Advantages of Thinking
Small," (invited) American Institute of Chemical
Engineers (AIChE), AES Electrophoresis Society
Award Session, 2013 Annual Meeting, Hilton Hotel, San Francisco, CA, November
6, 2013 6. R. Kant (Stanford University), D. Garmire,
H. Choo, R.S. Muller, "Characterization
of an Improved, Real-Time, MEMS-Based, Phase-Shifting Interferometer," IEEE
LEOS Optical MEMS and Nanophotonics 2007, Paper
TuP2, Hualien, Taiwan, August 12-16, 2007. 7. Richard S. Muller, "Plenty of Opportunity as
well as 'Room at the Bottom' - Some Examples in Optical MEMS,"
(invited) Fourth International conference on Networked Sensing Systems, INSS
2007, Braunschweig, Germany, Transducer Research
Foundation and IEEE Sensors Council, June 6-8, 2007. 8. D. Garmire, H. Choo, R. Kant, S. Govindjee, C. Séquin, R. S.
Muller, and J. Demmel, "Diamagnetically
Levitated MEMS Accelerometers," Poster Paper 2EM9.P,
Transducers 2007, Lyon, France, June 10-14, 2007. 9. Hyuck Choo, Rishi Kant, David Garmire, James
Demmel, and Richard S. Muller, "Fast, MEMS-Based,
Phase-Shifting Interferometer," 2006 Solid-State
Sensors, Actuators, and Microsystems Workshop, Technical Digest pp.94-95,
Transducers Research Foundation, Hilton Head Island, SC, June 4-8, 2006. 10. D. Garmire, H. Choo, R.S. Muller, S. Govindjee, and J. Demmel, "MEMS Process
Characterization with an on-Chip Device," Nano
Science and Technology Institute -- Nanotech 2006, Boston, MA, Vol. 3, pp.
550-553, 1:30pm, Tuesday May 9, 2006. 11. D.Garmire, H. Choo, R. S. Muller, S. Govindjee and J. Demmel, "Device for in-situ
Electronic Characterization of MEMS Applicable to Conducting Structural
Materials," Material Research Symposium Spring Meeting
2006, San Francisco, CA, (Moscone West), 3:45 PM,
Thursday Afternoon, April 20, 2006. 12. Blake C.-Y. Lin, Tsu-Jae King, and Richard
S. Muller, "Poly-SiGe MEMS actuators for adaptive optics," Photonics
WEST, sponsored by SPIE, The International Society for Optical Engineering,
Conference 6113, Paper 6113-28, San Jose, CA, January 25, 2006. 13. H. Choo, D. Garmire, J. Demmel,
and R.S. Muller, "A
Simple Process to Fabricate Self-Aligned High-Performance, Torsional Microscanners: Demonstrated Use in a Two-Dimensional
Scanner," 2005 IEEE/LEOS International Conference on
Optical MEMS and Their Applications, Technical Digest pp.21-2, Oulu, Finland,
Aug. 1-4, 2005. 14. D. Garmire, R. S. Muller, J. Demmel, "Vision-based
Teleoperation of a Stroboscopic Microscopic Interferometric System for Remote
Dynamic MEMS Testing" IEEE/LEOS International Conference
on Optical MEMS 2005, Oulu, Finland, August 2005, Technical Digest pp.
163-164, Oulu Finland, Aug. 1-4, 2005. 15. Hyuck Choo and Richard S. Muller, "Addressible
Microlens Array to Improve Dynamic Range of
Shack-Hartmann Sensors," 2004 Solid-State Sensor and
Actuator Workshop, Technical Digest pp.79-82, Transducers Research
Foundation, Hilton Head Island, SC, June 6-10, 2004. 16. Kishan Gupta, Hyuck Choo, Hanjun
Kim, and Richard S. Muller, "Micromachined Polarization Beam Splitters for the Visible
Spectrum," 2003 IEEE/LEOS International Conference on
Optical MEMS and Their Applications, Technical Digest pp. 171-2, Waikoloa
Beach, Kona, Hawaii, 18-21 August 2003. 17. Hyuck Choo and Richard S. Muller, "Microlenses
Fabricated Using Hydrophobic Effects and Polymer-Jet-Printing Technology,"
2003 IEEE/LEOS International Conference on Optical MEMS and Their
Applications, Technical Digest pp. 169-70, Waikoloa Beach, Kona, Hawaii,
18-21 August 2003. 18. Jongbaeg Kim, Hyuck Choo, Liwei Lin, Richard Muller,
"Microfabricated Torsional Actuators by Self-Aligned
Plastic Deformation," TRANSDUCERS '03: IEEE 12th
Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest, Vol. 2,
1015-18, Catalog No. 03TH8664, IEEE, 445 Hoes Lane, Piscataway, NJ, Boston,
MA, June 9-12, 2003. 19. Peter Krulevitch,...,Richard Muller et al, "MOEMS spatial light modulator development at
the Center for Adaptive Optics," SPIE Photonics West,
Micromachining and Microfabrication Conference, MOEMS and Miniaturized
Systems III, San Jose, CA, SPIE Vol. 4983, pp. 227-34, January, 2003. 20. Richard S. Muller, "MEMS Now and MEMS
Future," (invited) Workshop on Microelectromechanical
Systems, Tsing Hua University, Hsinchu, Taiwan, July 24, 2002. 21. Christian Rembe, Rishi Kant, Michael P.
Young, Richard S. Muller, "Network-connected
MEMS-measuring system for high-speed data transfer to CAD and simulation
tools," Conference on Vibration Measurements by Laser
Techniques," Italian Assn. for Laser Velocimetry, Ancona, Italy, 18-21
June 2002. 22. Patrick S. Riehl, Karen L. Scott, Richard S.
Muller, and Roger T. Howe, "High-resolution
Electrometer with Micromechanical Variable Capacitor,"
2002 Solid-State Sensor and Actuator Workshop, Transducers Research
Foundation, Hilton Head Island, South Carolina, June 2-6, 2002. 23. Carl W. Chang, Thomas Budde,
Hans H. Gatzen, Richard S. Muller, "A
Magnetically Actuated Scanner for Intravascular Ultrasound Imaging,"
IMCE: ASME Winter Meeting 2001, Tech. Digest: MEMS-Vol. 2001, New York, NY,
11-16 November 2001. 24. Christian Rembe, Pamela Caton,
Richard M. White, Richard S. Muller, "Stroboscopic
Interferometry for Characterization and Improvement of Flexural Plate-Wave
Transducers," SPIE Reliability, Testing, and
Characterization of MEMS/MOEMS, Vol. 4558, pp. 108-16, Millbrae, CA, 23
October 2001. 25. Christian Rembe, Rishi Kant, Richard S.
Muller, "Optical
Measurements to Study Dynamic Behavior in MEMS," SPIE
Microsystem Engineering Metrology and Inspection Conference, Vol. 4400,
127-37, Intl. Conf. Center, Munich, Germany, 18-22 June 2001. 26. Michael A. Helmbrecht, Uthara
Srinivasan, Christian Rembe, Roger T. Howe, and Richard S. Muller, "Micromirrors
for Adaptive-Optics Arrays," TRANSDUCERS '01: 11th
Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest, 1290-3,
CSM, Munich, Germany, Industriestrasse 35, D-82194 Gröbenzell, Munich, June 10-14, 2001. 27. Richard S. Muller, "MEMS, The View Back... and
the Vistas Ahead," (invited) TRANSDUCERS '01: 11th
Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest, 20-23, CSM,
Munich, Germany, Industriestrasse 35, D-82194 Gröbenzell, Munich, June 10-14, 2001. 28. Richard S. Muller, "MEMS, Now and Future,"
(invited), Intern. Symposia on Materials Science for the 21st
Century (ISMS-21), The Society of Materials Science, Japan, Tech. Digest
pp.107-11, Osaka, Japan, 21-26 May 2001. 29. C. Rembe, L. Muller, R.S. Muller, A. P.
Pisano, R. T. Howe, "Full
Three-Dimensional Motion Characterization of a Gimballed Electrostatic Microactuator," 2001 Intern.
Reliability Physics Symposium, Lake Buena Vista, FL, April 30-May 3, 2001. 30. Carl W. Chang, Paul Lum,
Richard S. Muller, "Magnetically
Actuated Microplatform Scanners for Intravascular
Imaging," ASME Winter Meeting 2000, Technical Digest:
MEMS-Vol. 2, 2000, pp. 673-8, Orlando, FL, 5-10 November 2000. 31. Satinderpall Pannu, Carl
Chang, Richard S. Muller, and Albert P. Pisano, "Closed-Loop Feedback-Control
System for Improved Tracking in Magnetically Actuated Micromirrors,"
Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest,
107-8, Kauai, HI, 20-24 August 2000. 32. Uthara Srinivasan, Michael A. Helmbrecht,
Christian Rembe, Richard S. Muller, Roger T. Howe, "Fluidic Self-Assembly of Micromirrors onto Surface Micromachined
Actuators," Optical MEMS 2000, IEEE/LEOS Intern. Conf.
on Optical MEMS, Tech. Digest, 59-60, Kauai, HI, 20-24 August 2000. 33. Christian Rembe, Matthew Hart, Michael A.
Helmbrecht, Uthara Srinivasan, Richard S. Muller, Kam Y. Lau, Roger T. Howe, "Stroboscopic Interferometer
with Variable Magnification to Measure Dynamics in an Adaptive-Optics Micromirror," Optical MEMS 2000,
IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest, 73-4, Kauai, HI, 20-24
August 2000. 34. Jocelyn T. Nee, Robert A. Conant, Richard S.
Muller, and Kam Y. Lau, "Lightweight, Optically Flat Micromirrors for Fast Beam Steering,"
Optical MEMS 2000, IEEE/LEOS Intern. Conf. on Optical MEMS, Tech. Digest,
9-10, Kauai, HI, 20-24 August 2000. 35. Robert A. Conant, Jocelyn T. Nee, Kam Y. Lau, Richard S. Muller, "Dynamic Deformation of
Scanning Mirrors," Optical MEMS 2000, IEEE/LEOS Intern.
Conf. on Optical MEMS, Tech. Digest, 49-50, Kauai, HI, 20-24 August 2000. 36. R. A. Conant, J. Nee, K. Lau, R. Muller, "A Fast Flat Scanning Micromirror," Solid-State Sensor and
Actuator Workshop, Transducers Research Foundation, Tech. Digest, 6-9, Hilton
Head Island, South Carolina, June 4-8, 2000. 37. Richard S. Muller, "Microphotonics:
The Optical Bench on a Silicon Chip," (invited), 2000
AAAS Annual Mtg and Science Innovation Exposition,
American Assn for the Advancement of Science, Washington, DC, 17-22 Feb.
2000. 38. Jocelyn T. Nee, Robert A. Conant, Matthew R.
Hart, Richard S. Muller, and Kam Y. Lau, "Stretched-Film Micromirrors for Improved Optical Flatness,"
IEEE MEMS 2000 Conference, Tech. Digest, 704-9, Miyazaki, Japan, January
2000. 39. Richard S. Muller, "MEMS, Quo Vadis in Century
XXI?" (invited) International Micro and Nano Engineering
Conference, p. 61, Rome, Italy, September 21-23, 1999. 40. Robert A. Conant, Jocelyn T. Nee, Matthew R.
Hart, Kam Y. Lau, and Richard S. Muller, "Robustness and Reliability
of Micromachined Scanning Mirrors,"
MOEMS '99: IEEE/LEOS, IEEJ/SAMS Intern. Conf. on Optical MEMS and Their
Applications, Mainz, Germany, Aug. 30-Sept 1, 1999. 41. P. M. Hagelin, U. Krishnamoorthy, R. Conant, R. S. Muller, K. Lau, O.
Solgaard, "Integrated
Micromachined Scanning Display Systems,"
18th Congress Intern. Commission for Optics, San Francisco, CA,
August 1999. 42. M. R. Hart, R. Conant, K. Y. Lau, R. S.
Muller, "Stroboscopic
phase-shifting interferometry for dynamic characterization of optical
MEMS," 18th Congress Intern. Commission for
Optics, San Francisco, CA, August 1999. 43. Matthew Hart, Robert A. Conant, Kam Y. Lau, and Richard S. Muller, "Time-resolved Measurement of
Optical MEMS Using Stroboscopic Interferometry,"
TRANSDUCERS '99, 10th International Conference on Solid-State
Sensors & Actuators, Tech. Digest 470-3, Sendai, Japan, 6-11 June 1999. 44. Robert A. Conant, Kam
Y. Lau, Richard S. Muller, Uma Krishnamoorthy, Olav
Solgaard, "A
Full-motion Video Display Using Micromachined
Scanning Micromirrors,"
TRANSDUCERS '99, 10th International Conference on Solid-State
Sensors & Actuators, Tech. Digest 376-9, Sendai, Japan, 6-11 June 1999. 45. Richard S. Muller, "MEMS: the
Promise for the 3rd Millennium," (invited), ISTM/99, 3rd
International Symposium on Test & Measurement, Xian, China, June 2, 1999.
46. Robert A. Conant and Richard S. Muller, "Cyclic Fatigue Testing of
Surface-Micromachined Thermal Actuators,"
ASME Intern. Mechanical Engineering Congress & Exposition, DSC-2: MEMS
Tribology and Material Issues, Vol. DSC 5A "MEMS Sensors Processing and
Tools," 273-277, Anaheim, CA, 18 November 1998. 47. J. T. Nee, K. Y. Lau, and R. S. Muller, "Scanning Blazed Gratings for
High-Resolution Spectroscopy," Solid-State Sensor and
Actuator Workshop, late-news paper, Transducer
Research Foundation, Hilton Head Island, SC, 8-11 June 1998. 48. Behrang Behin, Kam Y.
Lau, and Richard S. Muller, "Magnetically
Actuated Micromirrors for Fiber-Optic
Switching," Solid-State Sensor and Actuator Workshop,
273-6, Transducer Research Foundation, Hilton Head Island, SC, 8-11 June
1998. 49. Richard S. Muller, "Surface Micromachining for Microphotonics," (invited),
IEEE/LEOS, IEEJ/SAMS Intern. Conf. on Optical MEMS and Their Applications,
MOEMS97, Tech. Digest, 109-14, Nara, Japan, 18-21 Nov. 1997. 50. Richard S. Muller, "Surface Micromachining at
BSAC," (invited), Institute of Electrical Engineers of
Japan: Meeting on Sensors and Micromechines, Tech.
Digest, 2-6, Waseda Univ., Tokyo, Japan, 18-19 Nov.
1997. 51. Roger L. Hipwell,
Richard S. Muller, and Albert P. Pisano, "Characterization of Thin-Film Impact Microactuators," ASME Intern. Mech.
Eng. Conf. and Expo., DSC-Vol. 62, HTD-Vol. 354, pp. 87-92, Dallas, TX, 16-21
Nov. 1997. 52. Richard S. Muller, "BSAC Research on MEMS,"
(invited), XII Conference of the Brazilian Microelectronics Society, Hotel
Gloria, Caxambu, Brazil, 28 July- 1 August 1997. 53. Kirt R. Williams and Richard S. Muller, "Micromachined
Hot-Filament Ionization Pressure Sensor and Magnetometer,"
TRANSDUCERS '97: 9th Intern. Conf. on Sensors and Actuators, IEEE
and Transducers Research Foundation, Chicago, IL, 1249-52, 16-19 June 1997. 54. Meng-Hsiung Kiang, Dan A. Francis, Connie J. Chang-Hasnain, Olav Solgaard, Kam Y.
Lau, and Richard S. Muller, "Actuated
Polysilicon Micromirrors for Raster-Scanning
Displays," TRANSDUCERS '97: 9th Intern. Conf.
on Sensors and Actuators, IEEE and Transducers Research Foundation, Chicago,
IL, 323-26, 16-19 June 1997. 55. Meng-Hsiung Kiang, Jocelyn T. Nee, Kam
Y. Lau, and Richard S. Muller, "Surface-Micromachined Diffraction Gratings for Scanning
Spectroscopic Applications," TRANSDUCERS '97: 9th
Intern. Conf. on Sensors and Actuators, IEEE and Transducers Research
Foundation, Chicago, IL, 343-345, 16-19 June 1997. 56. Meng-Hsiung Kiang, Olav Solgaard, R. S. Muller, and K.
Y. Lau, "Micromachined Microscanners for
Optical Scanning," (late news), Photonics West: SPIE
Conference in Miniaturized Systems with Micro-optics and Micromechanics,
Proc. Vol 3008, 82-90, San Jose, CA, 8-14 Feb., 1997. 57. D. A. Francis, M.-H. Kiang, K. Y. Lau, R. S.
Muller, and C. J. Chang-Hasnain, "2D Beam-Scanning Using a Fan
Laser Array and Silicon Micromachined Microscanner," IEEE Lasers and
Electro-Optics Society Annual Meeting,(late news),
Boston, MA, 18-21 Nov. 1996. 58. Meng-Hsiung Kiang, Olav Solgaard, R. S. Muller, and K.
Y. Lau, "High-Precision
Silicon Micromachined Micromirrors
for Laser Beam Scanning and Positioning," Solid-State
Sensor and Actuator Workshop, (late news), Transducer Research Foundation,
Hilton Head Island, SC, 2-6 June 1996. 59. Jack W. Judy and Richard S. Muller, "Batch-Fabricated,
Addressable, Magnetically Actuated Microstructures,"
Solid-State Sensor and Actuator Workshop, 187-90, Transducer Research
Foundation, Hilton Head Island, SC, 2-6 June 1996. 60. M. J. Daneman, N. C. Tien, O. Solgaard, K.
Y. Lau, R. S. Muller, "Linear
Vibromotor-Actuated Micromachined
Microreflector for Integrated Optical
Systems," Solid-State Sensor and Actuator Workshop,
109-12, Transducer Research Foundation, Hilton Head Island, SC, 2-6 June
1996. 61. M. J. Daneman, N. C. Tien, O. Solgaard, K.
Y. Lau, R. S. Muller, "Actuated
Micromachined Microreflector
with Two Degrees of Freedom for Integrated Optical Systems,"
Integrated Photonics Research Conference, 6, 541-4, Boston MA, 29 April-2 May
1996. 62. M.-H. Kiang, O. Solgaard, R. S. Muller, and
K. Y. Lau, "Design
and Fabrication of High-Performance Silicon Micromachined
Resonant Microscanners for Optical Scanning
Applications," Integrated Photonics Research Conference,
6, 545-8, Boston MA, 29 April-2 May 1996. 63. Meng-Hsiung Kiang, Olav Solgaard, Richard S. Muller and
Kam Y. Lau, "Surface-Micromachined Electrostatic-Comb Driven Scanning Micromirrors for Barcode Scanners,"
IEEE MEMS '96 Workshop, 192-7, San Diego, CA, 11-15 February 1996. 64. N. C. Tien, M.-H. Kiang, M. J. Daneman, O.
Solgaard, K. Y. Lau, and R. S. Muller, "Actuation
of Polysilicon Surface-Micromachined Mirrors,"
SPIE Conference, Proceedings, Vol. 2687, San Jose, CA, 27 Jan.-2 Feb. 1996. 65. Jack W. Judy and Richard S. Muller, "Fabrication Processes for
Magnetic Microactuators with Polysilicon
Flexures," Fall Meeting of the Electrochemical Soc.,
Chicago, IL, 9-13 October, 1995. 66. N. C. Tien, O. Solgaard, M.-H. Kiang, M.
Daneman, K. Y. Lau and R. S. Muller, "Surface-micromachined mirrors for laser-beam positioning,"
TRANSDUCERS '95: IEEE Intern. Conf. on Solid-State Sensors and Actuators,
Tech. Digest 352-5, Stockholm, Sweden, 25-29 June, 1995. 67. Jack W. Judy and Richard S. Muller, "Magnetic microactuation
of torsional polysilicon structures," TRANSDUCERS '95:
IEEE Intern. Conf. on Solid-State Sensors and Actuators, Tech. Digest 332-5,
Stockholm, Sweden, 25-29 June, 1995. 68. M.-H. Kiang, O. Solgaard, M. Daneman, N. C.
Tien, R. S. Muller and K. Y. Lau, "High-precision
silicon-micromachined micromirrors
with on-chip actuation for external-cavity semiconductor lasers,"
Conf. on Lasers and Electro-optics (CLEO), Vol. 15 Tech. Digest 248-9,
Baltimore, MD, May, 1995. 69. M. Daneman, O. Solgaard, N. C. Tien, R. S.
Muller, K. Y. Lau, "Integrated
Laser to Fiber Coupling Module using a Micromachined
Alignment Mirror," Conf. on Lasers and Electro-optics
(CLEO), Baltimore, MD, May, 1995. 70. Solgaard, M. Daneman, N. C. Tien, A.
Friedberger, R. S. Muller, and K. Y. Lau, "Precision and performance of polysilicon micromirrors for hybrid integrated optics,"
SPIE International Symposium on Optoelectronic, Microphotonics
and Laser Technologies, Conference 2383A, San Jose, CA, 4-10 February 1995. 71. M. J. Daneman, N. C. Tien, O. Solgaard, A.
P. Pisano, K. Y. Lau, and R. S. Muller, "Linear Microvibromotor
for Positioning Optical Components," MEMS '95, 1995
Intern. Conference on Microelectromechanical Systems, Amsterdam, the
Netherlands, January 1995. 72. N. C. Tien, M. Daneman, O. Solgaard, K. Y.
Lau, and R. S. Muller, "Impact-actuated
linear microvibromotor for micro-optical systems on
silicon," IEEE Intern. Electr.
Dev. Mtg., San Francisco, CA, Tech Digest 924-926, 12-14 December, 1994. 73. Yao-Joe Yang, Chang-Jin
Kim, Hirotsugo Matoba,
and Richard S. Muller, "Thermal
Analysis of a Bistable Microactuator,"
ASME Winter Annual Mtg., DSC-Vol. 55-2, 687-93, Chicago, IL, 6-11 Nov. 1994. 74. Hirotsugu Matoba, Chang-Jin Kim, and Richard S. Muller, "Fabrication of a Bistable Snapping Microactuator,"
MICRO SYSTEM Technologies 94, 4th Intern. Conf. on Micro-Electro-Opto Mechanical Systems and Components, Tech. Dig.
1005-13, Berlin, Germany, 19-21 October 1994. 75. Richard S. Muller, "MEMS Research at Berkeley--
Polysilicon Devices and Systems," (invited), MICRO
SYSTEM Technologies 94, 4th Intern. Conf. on Micro-EElectro-Opto Mechanical
Systems and Components, Tech. Dig. 319-22, Berlin, Germany, 19-21 October
1994. 76. N. C. Tien, O. Solgaard, M. Daneman, A.
Friedberger, K. Lau, and R. S. Muller, "Movable,
High-Aspect Ratio Micromirror for Optoelectronic
Applications," Solid-State Sensor and Actuator Workshop,
Late News Poster Paper, Transducer Research Foundation, Hilton Head Island,
SC, 13-16 June 1994. 77. Jack W. Judy, R. S. Muller, and H. H. Zappe,
"Magnetic Microactuation of Polysilicon Flexure Structures,"
Solid-State Sensor and Actuator Workshop, Tech. Dig. 43-8, Transducer
Research Foundation, Hilton Head Island, SC, 13-16 June 1994. 78. Peter Y. Chen and R. S. Muller, "Microchopper-Modulated
IR Microlamp," Solid-State
Sensor and Actuator Workshop, Tech. Dig. 239-42, Transducer Research
Foundation, Hilton Head Island, SC, 13-16 June 1994. 79. Solgaard, M. Daneman, N. C. Tien, A.
Friedberger, R. S. Muller, and K. Y. Lau, "Micromachined
alignment mirrors for active optoelectronic packaging,"
late-news paper CPD6-1/15, Conference on Lasers and
Electro-Optics (CLEO), Anaheim, CA, 9-13 May 1994. 80. Richard S. Muller, "Microelectronics,
Micromechanics, Microdynamics, and MEMS,"
(invited),IEEE CANDE, Mandalay Beach Resort, Oxnard,
CA, 18 April 1994. 81. Hirotsugu Matoba, Toshio
Ishikawa, Chang-Jin Kim, and Richard S. Muller, "A Bistable
Snapping Microactuator," MEMS:
IEEE 7th Intern. Workshop, Tech. Digest, 45-50, Kanagawa, Japan,
January 1994. 82. Robert P. Ried, David M. Hong, and Richard
S. Muller, "Modulation
of Micromachined-Microphone Frequency Response
Using an On-diaphragm Heater," ASME Winter Annual
Meeting, Tech. Digest DSC Vol. 46, 7-12, New Orleans, LA, 28 Nov.- 3 Dec.
1993. 83. Richard S. Muller, "Micromachining Today,"
(invited), IEEE Intern. Vacuum Microcircuits Conference, Newport, RI, 12-15
June 1993. 84. Liwei Lin, Albert P. Pisano, and Richard S.
Muller, "Silicon
Processed Microneedles," TRANSDUCERS '93, 7th
Intern. Conference on Sensors and Actuators, sponsored by IEE Japan and the
Japan Science Foundation, Tech. Digest 237-40, Yokohama, Japan, June 7-10,
1993. 85. David P. Loconto
and Richard S. Muller, "Sensitive,
High-Impedance Micromechanical Electrostatic Voltmeter,"
TRANSDUCERS '93, 7th Intern. Conference on Sensors and Actuators,
sponsored by IEE Japan and the Japan Science Foundation, Tech. Digest 878-81,
Yokohama, Japan, June 7-10, 1993. 86. Kirt R. Williams and Richard S. Muller, "IC-Processed Hot-Filament
Vacuum Microdevices," IEEE Intern.
Electr. Devices Meeting, Tech. Digest, 387-390, San
Francisco, CA, December 13-16, 1992. 87. Robert P. Ried, Eun-Sok
Kim, David M. Hong, and Richard S. Muller, "Residual-Stress Compensation in Clamped-Clamped
Micromachined Plates," ASME
Winter Annual Meeting: Micromechanical Systems, DSC vol. 40, 23-32, Anaheim,
CA, 10-13 November, 1992. 88. Richard S. Muller, "Materials for
Microelectromechanical Systems,"(invited), Intern. Electr. Dev. and Materials Symposium, sponsored by the
ROC Ministry of Education in cooperation with IEEE Electr.
Dev. Society, Taipei, Taiwan, 1-4 November, 1992. 89. Richard S. Muller, "Microelectronics,
Micromechanics, Microdynamics, and MEMs,"
(invited), JPL, NASA, NRL Tunnel-Sensors Workshop, Caltech Jet Propulsion
Laboratory, Pasadena, CA, 29 July, 1992. 90. Richard S. Muller, "From Microcircuits to
Microsystems," (invited),38th National Symposium
American Vacuum Society, Seattle, WA, November 11-15, 1991. 91. Richard S. Muller, "Formidable Partners:
Microelectronics and Micromechanics," (invited), VDE
MICRO-SYSTEM Technologies 91, Berlin, Germany, 29 October-1 November, 1991. 92. Rolfe C. Anderson, Richard S. Muller, and
Charles W. Tobias, "Laterally
Grown Porous Polycrystalline Silicon: a New Material
for Transducer Applications," TRANSDUCERS '91, IEEE
Intern. Conference on Sensors and Actuators, Tech. Digest 747-50, San
Francisco, CA, June 24-28, 1991. 93. C. H. Hsu and R. S. Muller, "Micromechanical
Electrostatic Voltmeter," TRANSDUCERS '91, IEEE Intern.
Conference on Sensors and Actuators, Tech. Digest 659-62, San Francisco, CA,
June 24-28, 1991. 94. Chang-Jin Kim,
Albert P. Pisano, and Richard S. Muller, "Overhanging Electrostatic Microgripper,"
TRANSDUCERS '91, IEEE Intern. Conference on Sensors and Actuators, Tech.
Digest 610-13, San Francisco, CA, June 24-28, 1991. 95. Carlos H. Mastrangelo
and Richard S. Muller, "Design
and Performance of Constant-Temperature Circuits for Microbridge-Sensor
Applications," TRANSDUCERS '91, IEEE Intern. Conference
on Sensors and Actuators, Tech. Digest 471-4, San Francisco, CA, June 24-28,
1991. 96. E. S. Kim, J. R. Kim, and R. S. Muller, "Improved IC-Compatible
Piezoelectric Microphone and CMOS Process," TRANSDUCERS
'91, IEEE Intern. Conference on Sensors and Actuators, Tech. Digest 270-3,
San Francisco, CA, June 24-28, 1991. 97. Carlos H. Mastrangelo
and Richard S. Muller, "Fabrication
and Performance of a Fully Integrated Micro-Pirani Pressure Gauge with
Digital Readout," TRANSDUCERS '91, IEEE Intern.
Conference on Sensors and Actuators, Tech. Digest 245-8, San Francisco, CA,
June 24-28, 1991. 98. C. H. Mastrangelo
and R. S. Muller, "Thermal
Absolute-Pressure Sensor with On-Chip Digital Front-End Processor,"
IEEE Intern. Solid-State Circuits Conference, Paper TPM 11.5, 188-9, San
Francisco, CA, February 14, 1991. 99. Chang-Jin Kim,
Albert P. Pisano, Richard S. Muller, and Martin G. Lim, "Design, Fabrication and
Testing of a Polysilicon Microgripper,"
ASME Winter Annual Meeting, Tech. Digest, 99-109, Dallas, TX, Nov. 25-30,
1990. 100. Rolfe C. Anderson, Richard S. Muller, and
Charles W. Tobias, "Investigations
of the Electrical Properties of Porous Silicon," 178th
Fall Meeting of the Electrochemical Society, Extended Abstracts, Vol. 90-2,
1081, Seattle, WA, October 14-19, 1990. 101. Chang-Jin Kim,
Albert P. Pisano, Richard S. Muller, and Martin G. Lim, "Polysilicon Microgripper," IEEE Solid-State
Sensor and Actuator Workshop, Tech. Digest, 48-51, Hilton Head Island, SC,
June 4-7, 1990. 102. R.S. Muller, "Polycrystalline Silicon as a Mechanical
Material," (invited) Spring Annual Meeting Materials
Research Society, San Francisco, CA, 16-20 April, 1990. 103. R.S. Muller, "Micromechanics and Microdynamics,"
(invited), March Annual Meeting American Physical Society, Anaheim, CA, 12-16
March, 1990. 104. Y. -C. Tai and R. S. Muller, "Measurement of Young's
Modulus on Microfabricated Structures Using a
Surface Profiler," MEMS: 3rd IEEE Workshop on
Micro Electromechanical Systems, Napa Valley, CA, 12-14 February, 1990. 105. L. -S. Fan, R. S. Muller, W. Yun, R. T.
Howe, and J. Huang, "Spiral
Microstructures for the Measurement of Average Strain Gradients in Thin
Films," MEMS: 3rd IEEE Workshop on Micro
Electromechanical Systems, Napa Valley, CA, 12-14 February, 1990. 106. R. S. Muller, "Materials and Technologies
for Surface Micromechanics," (invited) Winter Annual
Meeting, American Society of Mechanical Engineers, San Francisco, CA,(December 13, 1989). 107. E. S. Kim, R. S. Muller, and P. R. Gray, "Integrated Microphone with
CMOS Circuits on a Single Chip," IEEE Intern. Electr. Devices Meeting, 880-3, Washington, DC, (December
4-6, 1989). 108. C. H. Mastrangelo
and R. S. Muller, "Vacuum-sealed
Silicon Micromachined Incandescent Light
Source," IEEE Intern. Electr.
Devices Meeting, 503-6, Washington, DC, (December 4-6, 1989). 109. R. S. Muller, "Microdynamics,"
(invited), Third Toyota Conference on Integrated Micro-motion Systems,
Nissin, Aichi, Japan,(22-25 October, 1989). 110. R. S. Muller, "Microdynamic
Structures on Silicon," European Scientific Symposium,
Hewlett-Packard Laboratories, Paris, France, Tech. Digest, 15-24 (September
20-21, 1989). 111. R. S. Muller, "Microdynamic
Structures on Silicon," (invited), VLSI 89, Intern. Conf.
of IFIP, the Intern. Federation for Information Processing, Munich, Germany,
Tech. Digest 487-93, (16-18 August, 1989). 112. R. S. Muller, “Microdynamics,"
(invited) SPIE Conference on Precision Engineering and Optomechanics,
San Diego, CA, (August 10-11, 1989). 113. Leslie A. Field and Richard S. Muller, "Fusing Silicon Wafers with
Low-melting-temperature Glass," TRANSDUCERS '89, 5th
International Conference on Sensors and Actuators, Montreux, Switzerland,
(25-30 June, 1989), Sensors and Actuators, A21-A23, 935-38 (1990). 114. Long-Sheng Fan, Roger T. Howe, and Richard
S. Muller, "Fracture-toughness
Characterization of Brittle Thin Films," TRANSDUCERS
'89, 5th International Conference on Sensors and Actuators,
Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23,
872-74 (1990). 115. Carlos H. Mastrangelo,
Yu-Chong Tai, and Richard S. Muller, "Thermophysical Properties of Low-Residual Stress
Silicon-Rich LPCVD Silicon Nitride Films," TRANSDUCERS
'89, 5th International Conference on Sensors and Actuators,
Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators, A21-A23,
856-60 (1990). 116. Rolfe C. Anderson, Richard S. Muller, and
Charles W. Tobias, "Investigations
of Porous Silicon for Vapor Sensing," TRANSDUCERS '89, 5th
International Conference on Sensors and Actuators, Montreux, Switzerland,
(25-30 June, 1989), Sensors and Actuators, A21-A23, 835-39 (1990). 117. Yu-Chong Tai and Richard S. Muller, "Integrated Stylus Force
Gauges," TRANSDUCERS '89, 5th International
Conference on Sensors and Actuators, Montreux, Switzerland, (25-30 June,
1989), Sensors and Actuators, A21-A23, 410-13 (1990). 118. Yu-Chong Tai and Richard S. Muller, "Frictional Study of
IC-Processed Micromotors,"
TRANSDUCERS '89, 5th International Conference on Sensors and
Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and Actuators,
A21-A23, 180-3(1990). 119. R. S. Muller, "Microdynamics,"
(invited), TRANSDUCERS '89, 5th International Conference on
Sensors and Actuators, Montreux, Switzerland, (25-30 June, 1989), Sensors and
Actuators, A21-A23, 1-8 (1990). 120. Raif S. Hijab and Richard S. Muller, "Residual Strain Effects on
Large Aspect Ratio Micro-Diaphragms," IEEE Micro
Electromechanical Workshop, 133-8, Salt Lake City, UT, (February 20-22,
1989). 121. L. -S. Fan, R. T. Howe, and R. S. Muller, "Microstructures for Fracture
Toughness Characterization of Brittle Thin Films," IEEE
Micro Electromechanical Workshop, 40-1, Salt Lake City, UT, (February 20-22,
1989). 122. Y. -C. Tai, L. -S. Fan, and R. S. Muller, "IC-Processed Micromotors Design, Technology, and Testing,"
IEEE Micro Electromechanical Workshop, 1-6, Salt Lake City, UT, (February
20-22, 1989). 123. L. -S. Fan, Y. -C. Tai, and R. S. Muller, "IC-Processed Electrostatic Micromotors," IEEE Intern. Electr. Devices Meeting,666-9, San Francisco, CA,
(awarded "Outstanding Student Paper Award”) (December 11-14, 1988).
124. R. S. Muller, Panelist for "Silicon Sensors - Pathways
to Commercialization," IEEE Intern. Electr.
Devices Meeting, San Francisco, CA, (December 11-14, 1988). 125. R. S. Muller, "IC-Compatible
Micromechanics," (invited), Amer. Inst. of Chemical Eng.
80th Annual Meeting, Washington, DC, (Nov. 27- Dec. 2, 1988). 126. R. S. Muller, "Integrated Circuits and Micromechanisms," (invited),
Power-Control and Integration Conference, Dearborn, MI, (October 3-7, 1988). 127. R. S. Muller, "Microstructures on Silicon--
A New Dimension for Mechanisms," (invited), 196th
American Chemical Society Meeting, Los Angeles, CA, (Sept 27, 1988). 128. K. S. Udell, A. P.
Pisano, R. T. Howe, R. M. White, and R. S. Muller, "Microsensors
for Heat Transfer and Fluid-Flow Measurements,"
(invited), 1st World Conference on Experimental Heat Transfer,
Fluid Mechanics, and Thermodynamics, Dubrovnik, Yugoslavia, (Sept. 4-9,
1988). 129. C. H. Mastrangelo
and R. S. Muller, "A
Constant-Temperature Gas Flowmeter with a Silicon Micromachined
Package," IEEE Solid-State Sensor and Actuator Workshop,
Tech. Digest 43-6, Hilton Head Island, SC, (June 6-9, 1988). 130. L. -S. Fan and R. S. Muller, "As-Deposited Low-Strain
LPCVD Polysilicon," IEEE Solid-State Sensor and Actuator
Workshop, Tech. Digest 55-8, Hilton Head Island, SC, (June 6-9, 1988). 131. Y. -C. Tai and R. S. Muller, "Fracture Strain of LPCVD
Polysilicon," IEEE Solid-State Sensor and Actuator
Workshop, Tech. Digest 88-92, Hilton Head Island, SC, (June 6-9, 1988). 132. Richard S. Muller, "Technologies and Materials
for Microsensors and Actuators,"
(invited), 7th Japanese Sensor Symposium, Tech. Digest 7-11, Tokyo,
Japan, (May 30-31, 1988). 133. L. -S. Fan, Y. -C. Tai, and R. S. Muller, "Movable Silicon
Microstructures," SPIE-Intern. Soc. for Opt. Eng. 1988
O.E. Lase Symposium, Los Angeles, CA, (Jan 10-15, 1988). 134. Y. -C. Tai, C. Mastrangelo,
and R. S. Muller, "Thermal
Conductivity of Heavily Doped LPCVD Polysilicon," IEEE
Intern. Electr. Dev. Mtg., Tech. Digest, 278-281,
Washington, DC (Dec. 6-9, 1987). 135. J. Chung and R. S. Muller, "The Development and
Applications of a Si-SiO2 Interface-State Measurement System based on a
Staircase Charge-Pumping Technique," IEEE Semiconductor
Interface Specialist's Conference, Fort Lauderdale, FL (Dec. 3-5, 1987). 136. R. S. Muller, "From ICs to Microstructures
Materials and Technologies," (invited) IEEE Conf. on Microrobots and Teleoperators,
IEEE Catalog No. 87TH0204-8, Hyannis, MA, (this workshop began the MEMS
Intern. Conference Series) (Nov. 9-11, 1987). 137. R. S. Muller, "Transducing Films and
Micromechanics for Integrated Sensors," (invited),
Electrochemical Soc. Fall Meeting, Extended Abstracts 87-2, 750, Honolulu, HI
(Oct. 18-23, 1987). 138. E. S. Kim and R. S. Muller, "Piezoelectric Readout
Miniature Microphone," International Hybrid Materials
Symposium, ISHM '87, Proceedings, 290-5, Minneapolis, MN (Sept. 28-30, 1987).
139. L. -S. Fan, Y. -C. Tai, and R. S. Muller, "Pin Joints, Gears, Springs,
Cranks, and Other Novel Micromechanical Structures,"
TRANSDUCERS '87, 4th Intern. IEEE & Electrochemical Society
Conf. on Solid-State Sensors and Actuators, Tech. Digest 849-52, Tokyo, Japan
(June 2-5, 1987). 140. Y. -C. Tai and R. S. Muller, "Lightly doped Polysilicon
Bridge as an Anemometer," TRANSDUCERS '87, 4th
Intern. IEEE & Electrochemical Society Conf. on Solid-State Sensors and
Actuators, Tech. Digest 360-3, Tokyo, Japan (June 2-5, 1987). 141. R. S. Muller, "Strategies for Sensor
Research," (invited), TRANSDUCERS '87, 4th
Intern. IEEE & Electrochemical Society Conf. on Solid-State Sensors and
Actuators, Tech. Digest 107-11, Tokyo, Japan (June 2-5, 1987). 142. L. A. Field and R. S. Muller, "Low-Temperature
Silicon-Silicon Bonding With Oxides,"
Electrochemical Society Spring Meeting, Tech. Digest 333-4, Philadelphia, PA,
(May 10-15, 1987). 143. R. S. Muller, "Advances in Piezoelectric
Films and Microstructures," (invited), Electrochemical
Society Symposium on Sensor Science and Technology, Cleveland, OH, (April
6-8, 1987). 144. E. S. Kim and R. S. Muller, "Micromachined
ZnO on Silicon Nitride Pressure Sensor,"
IEEE Intern. Conf. on Electr. Devices, Los Angeles,
CA, (Dec 8-10, 1986). 145. R. S. Muller, "New Opportunities with
Integrated Sensors" (invited), BIOTECH International
Conference and Exhibition,Volume
2 Part 5, 47-53, San Francisco, CA (Nov 18-20, 1986). 146. A. K. Oki and R. S. Muller, "Integrated Polysilicon
Tactile Sensor," IEEE Solid-State Sensors Workshop,
Hilton Head Island, SC (June 2-5, 1986). 147. D. L. Polla and R. S. Muller, "Zinc-Oxide Thin Films for
Integrated-Sensor Applications," IEEE Solid-State
Sensors Workshop, Hilton Head Island, SC (June 2-5, 1986). 148. R. S. Muller, "Smart Sensors,"
(invited) AIME Annual Meeting, New Orleans, LA (March 3, 1986). 149. J. I. Goicolea and
R. S. Muller, "A
Silicon Magneto-Coupler Using A Carrier-Domain
Magnetometer," IEEE Intern. Conf. on Electr.
Devices, Tech. Digest 276-9, Washington DC (December 2-4, 1985). 150. D. L. Polla, W. T. Chang, R. S. Muller, and
R. M. White, "Integrated
Zinc Oxide-on-Silicon Tactile-Sensor Array,"
IEEE Intern. Conf. on Electr. Devices, Washington
DC (December 2-4, 1985). 151. R. S. Muller, "New Industry/University Center
for the Study of Integrated Sensors," IEEE WESCON
Conference and Convention, San Francisco, CA, (November 20-22, 1985). 152. K. Uozumi, R. M.
White, and R. S. Muller, "IDT-generated
Ultrasonic Lamb Waves in a Very Thin Membrane," IEEE
Intern. Ultrasonics Symposium, San Francisco, CA
(October 16-18, 1985). 153. D. L. Polla, R. S. Muller, and R. M. White, "Pyroelectric Properties and
Applications of Sputtered Zinc Oxide Thin Films," IEEE
Intern. Ultrasonics Symposium, San Francisco, CA
(October 16-18, 1985). 154. D. L. Polla, R. M. White, and R. S. Muller, "Integrated Chemical-Reaction
Sensor," TRANSDUCERS '85, IEEE 3rd
International Conference on Solid-State Sensors and Actuators, 33-6,
Philadelphia, PA, (June 11-14, 1985). 155. Y. -C. Tai, R. S. Muller, and R. T. Howe, "Polysilicon Bridges for
Anemometer Applications," TRANSDUCERS '85, IEEE 3rd
International Conference on Solid-State Sensors and Actuators, 354-6,
Philadelphia, PA, (June 11-14, 1985). 156. R. S. Hijab and R. S. Muller, "Micromechanical Thin-Film Cavity
Structures for Low Pressure and Acoustic Transducer Applications,"
TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State
Sensors and Actuators, 178-81, Philadelphia, PA, (June 11-14, 1985). 157. J. I. Goicolea, R.
S. Muller, and J. E. Smith, "An
Integrable Silicon Carrier-Domain Magnetometer with
Temperature Compensation," TRANSDUCERS '85, IEEE 3rd
International Conference on Solid-State Sensors and Actuators, 300-3,
Philadelphia, PA, (June 11-14, 1985). 158. R. T. Howe and R. S. Muller, "Frequency Response of
Polycrystalline Silicon Microbridges,"
TRANSDUCERS '85, IEEE 3rd International Conference on Solid-State
Sensors and Actuators, 101-4, Philadelphia, PA, (June 11-14, 1985). 159. L. -S. Fan, R. M. White, and R. S. Muller, "Mutual Capacitive Normal-
and Shear-Sensitive Tactile Sensor," IEEE Intern. Electr. Dev. Meeting, 220-2, San Francisco, California,
(December 10-12, 1984). 160. D. L. Polla, R. S. Muller, and R. M. White, "Fully Integrated Zinc Oxide
on Silicon Pyroelectric Infrared Detector Array," IEEE
Intern. Electr. Dev. Meeting, 382-4, San Francisco,
California, (December 10-12, 1984). 161. R. T. Howe and R. S. Muller, "Integrated Resonant Microbridge Vapor Sensor," IEEE
Intern. Electr. Dev. Meeting, 213-6, San Francisco,
California, (December 10-12, 1984). 162. Richard S. Muller, "Integrating Sensors and
Electronics-- New Challenges for Silicon," (invited)
IEEE Intern. Electr. Dev. Meeting, 206-9, San
Francisco, California, (Decemmber 10-12, 1984). 163. Richard S. Muller, "Technologies for Integrated
Sensors," Government Microcircuit Applications
Conference, 276-9, Las Vegas, Nevada, (November 6-8, 1984). 164. Roger T. Howe and Richard S. Muller, "Resonant Polysilicon Microbridge with Integrated NMOS-Detection
Circuitry," Electrochemical Society Fall Meeting, New
Orleans, Louisiana, (October 7-12, 1984). 165. Richard S. Muller, "Perspectives on Integrated
Sensors," (invited) Electrochemical Society Fall
Meeting, New Orleans, Louisiana, (October 7-12, 1984). 166. Richard S. Muller, "New Dimensions for
Integrated Sensors," (invited) IEEE Workshop on
Solid-State Sensors and Actuators, Hilton Head Island, South Carolina, (June
6-9, 1984). 167. D. L. Polla, R. S.Muller and R. M. White, "Monolithic Integrated Zinc
Oxide on Silicon Pyroelectric Anemometer," IEEE Intern. Electr. Dev. Mtg., Tech. Digest 639-41, Washington, DC,
(Dec. 5-7, 1983). 168. Richard S. Muller, "Strain and Heat-Sensitive
Thin-Film Transducers," (invited), TRANSDUCERS '83, 2nd
Intern. Conf. on Solid-State Sensors and Actuators, Tech Digest 93, Tech.
Univ. of Delft, Netherlands, (May 31-June 3, 1983). 169. R. T. Howe and R. S. Muller, "Micro-Mechanical Properties
of Polycrystalline and Amorphous Silicon Films,"
TRANSDUCERS '83, 2nd Intern. Conf. on Solid-State Sensors and
Actuators, Tech Digest 61, Tech. Univ. of Delft, Netherlands, (May 31-June 3,
1983). 170. C. Hu, S. Tam, F. -C. Hsu, R. S. Muller and
P. K. Ko, "Correlating
the Channel, Substrate, Gate, and Minority-Carrier Currents in MOSFETs,"
IEEE Intern. Solid-State Circuits Conf., Tech. Digest 88-9, New York, NY (Feb
23, 1983). 171. F. -C. Hsu, R. S. Muller, and C. Hu, "Characteristics of
Short-Channel MOSFETs in the Breakdown Regime," Intern. Electr. Dev. Meeting, Tech. Digest 282-5, San Francisco,
CA (Dec. 1982). 172. F. -C. Hsu, P. K. Ko,
S. Tam, R. S. Muller, and C. Hu, "Avalanche-Induced
Breakdown Mechanisms in Short-Channel MOSFETs," IEEE
Solid-State Device Research Conf., Colorado State University, Fort Collins,
CO, (June 21-23, 1982). 173. S. Tam, P. K. Ko,
F -C. Hsu, C. Hu, and R. S. Muller, "Hot-Electron
Induced Excess Carriers in n-Channel MOSFETs," IEEE
Solid-State Device Research Conf., Colorado State University, Fort Collins,
CO, (June 21-23, 1982). 174. R. T. Howe and R. S. Muller, "Polycrystalline Silicon
Micromechanical Beams," Spring Meeting of the
Electrochemical Society, Montreal, Canada, (May 9-14, 1982). 175. M. E. Motamedi, A.
P. Andrews, R. Colton, E. Staples, R. S. Muller, and P. -L. Chen, "Application of
Electrochemical Etch-Stop in Processing a Silicon Accelerometer,"
Spring Meeting of the Electrochemical Society, Montreal, Canada, (May 9-14,
1982). 176. P. K. Ko, R. S.
Muller, and C. Hu, "A
Unified Model for Hot-Electron Currents in MOSFETs,"
IEEE Intern. Electr. Dev. Meeting, Washington DC,
(Dec. 7-9, 1981). 177. A. E. Comer and R. S. Muller, "A Monolithic ZnO/Si PI-DMOS SAW Convolver,"
IEEE Ultrasonics Symposium, Chicago, IL, (Oct.
14-16, 1981). 178. Richard S. Muller, "The New Wave of
Sensors," European Solid-State Device Research Conf.,
(invited) Toulouse, France, (Sept. 14-17, 1981). 179. J. I. Goicolea, R.
S. Muller, and J. E. Smith, "Highly
Sensitive Integrable Silicon Carrier-Domain
Magnetometer," IEEE Intern. Solid-State Device Research
Conf., University of California, Santa Barbara, (June 22-24, 1981). 180. S. Tam, P. K. Ko,
C. Hu, and R. S. Muller, "Correlation
Between Substrate and Gate Currents in MOSFETs," IEEE
Intern. Solid-State Device Research Conf., University of California, Santa
Barbara, (June 22-24, 1981). 181. P. -L. Chen, R. S. Muller, R. Jolly, G. Halac, R. M. White, A. P. Andrews, and M. E. Motamedi, "A
Planar Processed PI-FET Accelerometer," IEEE Intern. Electr. Dev. Meeting, Washington, D.C., (Dec. 8-10, 1980).
182. P. -L. Chen, R. S. Muller, R. M. White, and
R. Jolly, "Thin-Film
ZnO-MOS Transducer with Virtually DC
Response," IEEE Ultrasonics
Symposium, 945-948, Boston, MA, (Nov. 5-7, 1980). 183. M. T. Fertsch, R.
S. Muller, and R. M. White, "Surface-Acoustic-Wave
Vapor-Sensing Device," IEEE Intern. Solid-State Device
Research Conf, Cornell University, Ithaca, NY,
(June 23-25, 1980). 184. T. Shiosaki, T.
Yamamoto, A. Kawabata, R. S. Muller, and R. M. White, "Fabrication and
Characterization of ZnO Piezoelectric Films for
Sensor Devices," IEEE Intern. Electr.
Dev. Meeting, 151-154, Washington, DC,(Dec. 3-5,
1979). 185. P. K. Ko and R. S.
Muller, "Design
and Performance of Resistive-Gated MOSFETs for Analog Integrated
Circuits," IEEE Intern. Electr.
Dev. Meeting, Washington, DC, (Dec. 3-5, 1979). 186. C. T. Chuang, R. M. White, A. Lee, P. L.
Chen, R. S. Muller and T. Shiosaki, "Ultrasonic Receiving Array
Having Power Response," IEEE Ultrasonics
Symposium, Chicago, IL, (October, 1979). 187. P. L. Chen, T. Shiosaki,
R. S. Muller, and R. M. White, "Silicon
Cantilever-Beam Accelerometer Utilizing a PI-FET Capacitive Transducer,"
IEEE Intern. Solid-State Device Research Conf., University of Colorado,
Boulder, CO (June 25-28, 1979). 188. R. A. Blauschild
and R. S. Muller, "An
Integrated NMOS Voltage Reference," Workshop: IEEE
Solid-State Circuits and Technology Committee and the VLSI Committee of the
IEEE Electr. Dev. Society, Hilton Head Island,
South Carolina,(Sept. 6-8, 1978). 189. R. M. White, S. H. Kwan, C. T. Chuang, and
R. S. Muller, "Integrated
Ultrasonic Transducer," ARPA/AFML Review of Progress in
Quantitative Non-Destructive Evaluation, Scripps Inst. of Oceanography,
University of Calif., San Diego, (July 17-21, 1978). 190. R. Amantea and R.
S. Muller, "The
Effects of Charge Injection on Avalanche-Injected Oxide Current,"
IEEE Solid-State Device Research Conference, Univ. of Calif., Santa Barbara,
CA, (June 26-28, 1978). 191. S. H. Kwan, R. M. White, and R. S. Muller, "Material and Device
Constraints in Piezoelectric FET Strain Transducers,"
IEEE Solid-State Device Research Conference, Univ. of Calif., Santa Barbara,
CA, (June 26-28, 1978). 192. R. S. Blauschild,
P. Tucci, R. G. Meyer, and R. S. Muller, "An NMOS Voltage Reference,"
IEEE Intern. Solid-State Circuits Conference, San Francisco, CA, (Feb. 15-17,
1978). 193. S. H. Kwan, R. M. White, and R. S. Muller, "Integrated Ultrasonic
Transducer," IEEE Ultrasonics
Symposium, IEEE Catalog No. 77CH1264-1SU, Phoenix, AZ, (Oct. 26-28, 1977). 194. R. Amantea and R.
S. Muller, "The
Effects of Charge Injection on Gated-Diode Breakdown,"
IEEE Solid-State Device Research Conference, Cornell University, Ithaca, NY,
(June 27-29, 1977). 195. R. W. Coen and R. S. Muller, "Experimental Determination
of Carrier Velocities in Inversion Layers on Silicon,"
IEEE Solid-State Device Research Conference, Cornell University, Ithaca, NY,
(June 27-29, 1977). 196. S. H. Kwan, R. M. White, and R. S. Muller, "High-Frequency Strain
Transducer for Acoustic-Wave Signal Processing," IEEE
Solid-State Device Research Conference, Cornell University, Ithaca, NY, (June
27-29, 1977). 197. S. H. Kwan, R. S. Muller, and R. M. White, "Integrated Ultrasonic
Transducer," ARPA/AFML Conf. Review of Progress in
Quantitative Nondestructive Evaluation of Materials, Cornell University,
Ithaca, NY, (June 14-17, 1977). 198. K. W. Yeh, S. H. Kwan, and R. S. Muller, "Detection of Acoustic Waves
with PI-DMOS Transducers," IEEE Intern. Conf. on
Solid-State Devices, Tokyo, Japan, (Sept.1-3, 1976). 199. R. Amantea and R.
S. Muller, "Studies
of Localized Charge Injection in Surface-Avalanched PN Junctions,"
IEEE Intern. Conf. on Solid-State Devices, Tokyo, Japan, (Sept.1-3, 1976). 200. T. Masuhara and R. S. Muller, "Analytical Techniques for
the Design of DMOS Transistors," IEEE Intern. Conf. on
Solid-State Devices, Tokyo, Japan, (Sept.1-3, 1976). 201. K. W. Yeh and R. S. Muller, "Characterization and
Fabrication of PI-DMOS Strain Transducers,"
Electrochemical Society Annual Meeting, Washington, D.C., (May 2-7, 1976). 202. R. S. Muller and K. W. Yeh, "Piezoelectric Field-Effect
Transducers," (invited) IEEE Workshop on Medical
Applications of Micro-pressure Transducers, Case
Western-Reserve University, Cleveland, Ohio, (Dec. 4-5, 1975). 203. T. Masuhara and R. S. Muller, "Complementary DMOS Process
for LSI," IEEE Intern. Electr.
Dev. Meeting, Washington, D.C., (Dec. 1-3, 1975). 204. K. W. Yeh, W. K. Wu, R. S. Muller and J.
Washburn, "Characterization
of RF Sputtered Zn0 Piezoelectric Films Using Transmission Electron
Microscope," Electron Microscopy Society of America, MGM
Grand Hotel, Las Vegas, NV, (Aug. 11-15, 1975). 205. K. W. Yeh and R. S. Muller, "Piezoelectric Diffused MOS
(PI-DMOS) Transistor as Strain Transducer," IEEE Intern.
Solid-State Device Research Conf., Ottawa, Canada, (June 24-26, 1975). 206. R. S. Muller, "Effective Recombination
Velocity at a Buried Layer to Epitaxial Interface," IEEE
Intern. Solid-State Device Research Conf., Ottawa, Canada, (June 24-26,
1975). 207. J. T. C. Chen and R. S. Muller, "Barrier Model for Carrier
Transport at Weakly Inverted Silicon Surfaces," Intern.
Solid-State Device Research Conf., University of Colorado, Boulder, CO, (June
26-28, 1973). 208. R. S. Muller, "Performance of
Resistive-Gated IGFET Structures," Eurocon
1971, 1st European IEEE-Sponsored Convention, Lausanne,
Switzerland, (18-22 October 1971). 209. R. S. Muller, "Progress in Research on
Piezoelectric Field-Effect Mechano-Electric
Transducers," Eurocon 1971, 1st
European IEEE-Sponsored Convention, Lausanne, Switzerland, (18-22 October
1971). 210. R. S. Muller, "Resistive-Gated IGFET
Structures," IEEE Solid-State Device Research
Conference, University of Michigan, Ann Arbor, (June 28, 1971). 211. J.R. Fiebiger and
R.S. Muller, "Effects
of Low Energy Electron Beam Bombardment on Semiconductor Properties,"
138th Mtg of the Electrochem.
Soc., Atlantic City, New Jersey, (October, 1970). 212. J. Conragan and R.S. Muller, "Piezoelectric Field-Effect
Transistor Strain Transducers," IEEE Solid-State Sensors
Symposium, Minneapolis, Minn., (June 18-19, 1970). 213. R.S. Muller, "Experimental Studies of IGFET Transconductance Variations,"
Intern. Conf. on Properties and Uses of MIS Structures, Centre D'Etudes Nucleaires, Grenoble, France,(June 17-20, 1969). 214. J. E. Schroeder and R.S. Muller, "Studies of IGFET's with
Non-equipotential Gates," Intern. Solid-State Device
Research Conf., University of Rochester, New York, (June 23-26, 1969). 215. J. E. Schroeder and R.S. Muller, "Properties of a Field-Aided
IGFET," European Solid-State Device Research Conference,
IEEE, German Physical Society and the Society of Electrical Engineers,
Munich, Germany, (March 24-27, 1969). 216. T.I. Kamins and R.S. Muller, "Field-Effect Conductance
Modulation in Extremely Thin Films of Cesium," IEEE
Intern. Solid-State Device Research Conference, Univ. of Colorado, Boulder,
CO, (June 19-21, 1968). 217. J.R. Schroeder and R.S. Muller, "Numerical Calculation of the
Field Distribution and Related Device Parameters for MOS Transistors in
Saturation," Intern. Electr.
Dev. Meeting, Washington DC, (Oct. 18-20, 1967). 218. R.S. Muller, "Electron-Beam Probing of Semiconductor
Materials and Devices," 2nd Symposium on Test
Methods and Measurements of Semiconductor Devices, Budapest, Hungary, (April
26, 1967). 219. R.S. Muller, "Piezoelectric MOS Transducers,"
European Solid-State Device Research Conf., Bad Nauheim, Germany, (April 20,
1967) 220. J. R. Fiebiger and
R.S. Muller, "An
Evaluation of Vacuum-Deposited MIPS Electromechanical Transducers,"
IEEE Intern. Conf. on Electr. Dev., Washington,
D.C., (Oct. 28, 1966). 221. J. Conragan and R.S. Muller, "The Deposited Piezoelectric
MOS Device as an Electromechanical Transducer,"
Specialists Conference on Thin-Film Electronics, sponsored by IEEE, NASA,
ONR, and ARO, Johns Hopkins University, (April 14-15, 1965). 222. R.S. Muller, "Theoretical Admittance Variation with Frequency
in Insulators Having Traps Subject to Charge Injection,"
Intern. Conf. on Physics of Semiconductors, Paris, France, (July 19-24,
1964). 223. D.V. Geppert, B.V.
Dore, and R.S. Muller, "Graded-Gap,
Thin-Film Schottky Barriers,"
Spring Meeting of the Electrochemical Society, Toronto, Canada, (May, 1964). 224. R. Zuleeg and R.S.
Muller, "Vapor-Deposited,
Thin-Film Heterojunction Diodes," Conference on
Solid-State Physics,Institute
of Physics and the Physical Society, Bristol, England, (January 1-4, 1964). 225. R.S. Muller and R. Zuleeg,
"Space-Charge-Limited
Currents and Schottky Emission Currents in
Thin-Film CdS Diodes," Intern.
Electr. Devices Meeting, Washington,D.C., (Oct.31 -
Nov.1, 1963). 226. R.S. Muller, "Schottky High-Field
Emission at Au-CdS Rectifying Contacts,"
Solid-State Device Research Conference, Michigan State University, East
Lansing, Michigan, (June 12-14, 1963). 227. R.S. Muller, "A Unified Approach to the Theory of
Space-Charge-Limited Currents in an Insulator with Traps,"
Summer Meeting of the Amer. Phys. Soc., APS Bull. 28-30, Edmonton, Alberta,
Canada, (August 1963). 228. R.S. Muller, "Detection of Trapping and Contact Properties
Through Capacitance Measurements of Dielectric Crystals Subject to Charge
Injection," Conference on Space-Charge Effects in Dielectrics,
sponsored by the State University of New York and the U.S. Office of Naval
Research, Westhampton Beach, Long Island, June 13-15, 1962 (Conference report
in Physics Today; 30-34, October 1962). |
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Last updated January
7, 2016 |