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Status of publication | Final |
Date and Time of Registration | Thu 2013-Dec-12 09:04:46 |
Registration ID | 1386867886 |
1. Author | Kim, M.-S. |
2. Author | Kim, M.-S. |
3. Author | Hsia B. |
4. Author | Carraro, C. |
5. Author | Maboudian, R. |
Year | 2013 |
Month | 1 |
Dates | |
Publisher | MEMS |
Type of Publication | Conference |
Keywords | Supercapacitor, Flexible, Photoresist |
ISBN | |
Pages | |
Booktitle | |
Publication in PDF form | Publication in pdf |
Abstract | This paper reports a simple and scalable technique for the fabrication of flexible micro-supercapacitors. The supercapacitor electrodes are synthesized via the pyrolysis of patterned photoresist on a SiO2/Si substrate. The electrodes can then be moved to flexible substrates through a simple transfer process. The fabricated devices show excellent energy density of 0.3 mJ/cm2, maximum power density of 5 mW/cm2, and good performance under electrochemical cycling. The electrochemical performance is maintained after 300 mechanical bending cycles. |
Notes | |
Lastupdate | Thu 2013-Dec-12 09:04:46 |
Contact Email Regarding this Publication | benhsia@berkeley.edu |