||Tue 2011-Feb-01 20:20:57
||Mon 2017-Jan-23 15:07:15
||MEMS gyroscopes for consumer devices, such as smartphones and tablets, suffer from high
power consumption and drift which precludes their use in inertial navigation applications.
Conventional MEMS gyroscopes detect Coriolis force through measurement of very small
displacements on a sense axis, which requires low-noise, and consequently high-power,
electronics. The sensitivity of the gyroscope is improved through mode-matching, but this
introduces many other problems, such as low bandwidth and unreliable scale factor.
Additionally, the conventional Coriolis force detection method is very sensitive to asymmetries
in the mechanical transducer because the rate signal is derived from only the sense axis.
Parasitic coupling between the drive and sense axis introduces unwanted bias errors which
could be rejected by a perfectly symmetric readout scheme. This project develops frequency
modulated (FM) gyroscopes that overcome the above limitations. FM gyroscopes also promise to
improve the power dissipation and drift of MEMS gyroscopes. We present results from a
prototype FM gyroscope with integrated CMOS readout electronics demonstrating the principle.
|IAB Research Area
||Physical Sensors & Devices
||Burak Eminoglu, Kaveh Gharehbaghi
||Bernhard E. Boser