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Physical Sensors & Devices
     
 

BPN851: High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates

Project ID BPN851
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Start Date Tue 2017-Jan-10 16:34:44
Last Updated Mon 2017-Aug-14 14:32:47
Abstract This study presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a transparent substrate. PMUTs with diameters ranging from 40 microns to 100 microns were fabricated, resulting in resonant frequencies from 3 MHz to 18 MHz in air. A high fill-factor of 62% was achieved. Immersed pulse-echo experiments were conducted at 2.5 MHz.
Status Continuing
Funding Source Industry
IAB Research Area Physical Sensors & Devices
Researcher(s) Guo-Lun Luo
Advisor(s) David A. Horsley
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