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Wireless, RF & Smart Dust
     
 

BPN565: AlN Piezo: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators

Project ID BPN565
Website
Start Date Thu 2010-Aug-05 13:55:21
Last Updated Thu 2010-Aug-05 14:15:22
Abstract The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with small frequency-temperature drifts, high-Q, multi-frequencies, and CMOS compatibility on one single chip.
Status New
Funding Source DARPA
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Chih-Ming Lin
Advisor(s) Albert P. Pisano
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