| Project ID |
BPN351 |
| Website |
|
| Start Date |
Sun 2006-Jul-30 23:27:11 |
| Last Updated |
Tue 2009-Aug-11 11:02:37 |
| Abstract |
A scanning-probe magnetic microscopy based on a high resolution magnetic tunnel junction (MTJ) sensor is under construction. MTJ sensors are highly sensitive magnetic field sensors but suffer from large 1/f noise. We have developed a new approach for reducing the 1/f noise in an MTJ sensor by using a MEMS resonator to mechanically modulate the magnetic field signal to a high frequency. MEMS actuators are uniquely suited to achieve both precise, micron-scale control of the average sample-to-sensor separation and to AC modulate the separation and MTJ signal at a very high frequency (>10kHz). We have developed a fabrication process where the MTJ sensor is fabricated first on the surface of an SOI wafer. Next, MEMS actuators are fabricated in a two step deep reactive ion etching process. We have demonstrated that the actuator designs work and began the final MTJ-MEMS layout. Integrated devices are currently under fabrication and will be characterized subsequently. |
| Status |
Continuing |
| Funding Source |
Federal |
| IAB Research Area |
Package, Process & Microassembly |
| Researcher(s) |
Gerardo Jaramillo |
| Advisor(s) |
David A. Horsley |
|
|
