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Guo-Lun Luo, Ph.D. 2020

Mechanical and Aeronautical Engineering
Advisor: Prof. Horsley

BIOGRAPHY
Guo-Lun Luo received the double-major B.S. degree of Physics Science/ Aeronautics and Astronautics from National Cheng Kung University in 2011, and the M.S. degree in Mechanical engineering from National Tsing Hua University in 2013. He joined Asia Pacific Microsystems, Taiwan, in 2013, where he was an R&D senior engineer and project manager for the development of MEMS process. He is currently pursuing the Ph.D. degree at UC Davis. His current research interests include MEMS physical sensors and actuators.

High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates [BPN851]
This study presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined
ultrasonic transducers (PMUTs) fabricated on a transparent substrate. PMUTs with diameters ranging
from 40 microns to 100 microns were fabricated, resulting in resonant frequencies from 3 MHz to 18
MHz in air. A high fill-factor of 62% was achieved. Immersed pulse-echo experiments were conducted
at 2.5 MHz.


Current Active Projects:
BPN851
 

     Last Updated: Mon 2017-Feb-13 16:04:23

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