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Qi Wang, Ph.D. 2018

Mechanical Engineering
Advisor: Prof. Horsley

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Research Interests: Piezoelectric MEMS sensors and actuators

BIOGRAPHY
Qi is currently a Ph.D. student in Prof. David A. Horsley’s group in University of California, Davis. He received his B.E. degree in Mechanical Engineering and Automation from Nanjing University of Aeronautics and Astronautics, China in 2011, and M. E. degree in Nanomechanics from Tohoku University, Japan in 2013.

Scandium AlN (ScAlN) for MEMS [BPN785]
The goal of this project is to design, fabricate and characterize novel MEMS devices based on scandium aluminum nitride (ScAlN) thin films. ScAlN thin film is a promising piezoelectric material due to its CMOS process compatibility, low relative permittivity and high piezoelectric coefficient and enables better performance of piezoelectric MEMS devices.


Current Active Projects:
BPN628
BPN785
 

     Last Updated: Thu 2017-Sep-28 16:43:54

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